Apr 20, 2024  
2021-2022 Undergraduate Academic Catalog 
2021-2022 Undergraduate Academic Catalog [ARCHIVED CATALOG]

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ME 5601 - Microelectromechanical Systems Fundamentals

3 lecture hours 0 lab hours 3 credits
Course Description
This course introduces the modeling, analysis, and design of microelectromechanical systems. The development of first-principles is emphasized with sufficient review of material science, engineering mechanics, and thermofluids for microsystems design.  Various sensing and actuation devices will be analyzed, and scaling laws for miniaturization will be reviewed to highlight the dominant mechanisms at the microscale.  Materials and fabrication processes for microsystems and micromanufacturing methods will be covered.  Students will get an opportunity to do case studies on microsystems design and review the current literature on the ever-growing research advances in MEMS. (prereq: GE 601 or equivalent)
Course Learning Outcomes
Upon successful completion of this course, the student will be able to:
  • Apply mechanics and thermofluids concepts in miniaturizing engineering systems
  • Apply scaling laws to identify dominant mechanisms at microscale
  • Design/analyze microsensors, microactuators
  • Select materials and processes for microsystems design

Prerequisites by Topic
  • Engineering mechanics
  • Systems dynamics

Course Topics
  • Introduction and overview
  • Microsystems working principles: sensing microsystems working principles: actuation
  • Doping, diffusion, electrochemistry
  • Engineering mechanics for microsystems
  • Thermofluid engineering and microsystems
  • Scaling Laws in miniaturization
  • More problems on sensors and actuators
  • Materials for MEMS
  • Fabrication processes for microsystems
  • Microsystems design and case studies
  • Case study samples: BP Sensor, microphone, acceleration sensors, gyros, airbag deployment in an automobile, aerospace: cockpit instrumentation, optical MEMS, RF MEMS, noise in MEMS

Dr. Subha Kumpaty

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