| |
Apr 24, 2024
|
|
|
|
|
MEC 5601 - MicroElectroMechanical Systems Fundamentals3 lecture hours 0 lab hours 3 credits
Course Description
This course is an introduction to the modeling, analysis, and design of microelectromechanical systems. The development of first-principles is emphasized with sufficient review of material science, engineering mechanics, and thermofluids for microsystems design. Various sensing and actuation devices will be analyzed and scaling laws for miniaturization will be reviewed to highlight the dominant mechanisms at the microscale. Materials and fabrication processes for microsystems and micromanufacturing methods will be covered. Students will get an opportunity to do case studies on microsystems design and review the current literature on the ever-growing research advances in MEMS. (prereq: EGR 6010 or program director consent)
Course Learning Outcomes
Upon successful completion of this course, the student will be able to:
- Apply scaling laws to identify dominant mechanisms at microscale
- Apply mechanics and thermofluids concepts in miniaturizing engineering systems
- Design/analyze microsensors
- Design/analyze microactuators
- Select materials and processes for microsystems design
- Conduct case studies and review state-of-art commercial devices
Prerequisites by Topic
- Engineering mechanics
- Systems dynamics
Course Topics
- Scaling laws in miniaturization
- Single and multiple DOF resonators
- Why silicon? (polymers in MEMS and processes in subsequent weeks)
- Beams as springs
- Electrostatic sensing and actuation
- Thermal transduction
- Piezoresistive sensing
- Piezoelectric sensing and actuation
- Plates and sensors
- Microfluidics, stiction
- Continuous system resonators
- Case study samples: BP sensor, microphone, acceleration sensors, gyros, airbag deployment in an automobile, aerospace: cockpit instrumentation, optical MEMS, RF MEMS, noise in MEMS
Coordinator
Dr. Subha Kumpaty
Add to Portfolio (opens a new window)
|
|
Skip to Main Content
